Bergmaier, Andreas; Dollinger, Günther; Faestermann, Thomas; Frey, C. M.; Ferguson, M.; Güttler, H.; Schulz, G.; Willerscheid, H.
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Detection of nitrogen in CVD diamond
Zeitschrift:
Diamond and Related Materials
Jahrgang:
5
Heftnummer:
9
Jahr:
1996
Seiten von - bis:
995-997
Sprache:
Englisch
Stichwörter:
CVD diamond ; ERD ; Morphology ; Nitrogen content
Abstract:
A series of CVD diamond films was analysed for their nitrogen content by high resolution elastic recoil detection (ERD) in order to investigate the incorporation of nitrogen from the gas phase in a CVD reactor into the growing diamond film. CVD diamond films were deposited from a mixture of 1.5