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Authors:
Pabst, Detlef; Fowler, John W.; Pfund, Michele E.; Mason, Scott J.; Rose, Oliver; Mönch, Lars; Sturm, Roland 
Document type:
Konferenzbeitrag / Conference Paper 
Title:
Deterministic scheduling of wafer fab operations 
Title of conference publication:
Worldwide Automation Symposium 2003 
Subtitle of conference publication:
Operational Excellence. October 20-24, 2003 Phoenix, AZ 
Conference title:
Worldwide Automation Symposium (2003, Phoenix, AZ) 
Venue:
Phoenix, AZ, USA 
Year of conference:
2003 
Date of conference beginning:
20.10.2003 
Date of conference ending:
24.10.2003 
Year:
2003 
Language:
Englisch 
Open Access yes or no?:
Nein / No