Login
Document type:
Konferenzbeitrag / Conference Paper
Title:
Nitrogen profile and electrical properties of reoxidized thermally grown silicon nitrides
Collection editors:
Sah, R. E.; Deen, M. J.; Zhang, J.; Yota, J.; Kamakura, Y.
Title of conference publication:
Proceedings - Electrochemical Society
Subtitle of conference publication:
207th ECS Meeting; Quebec; Canada; 16 May 2005 through 20 May 2005; Code 66429
Series title:
Proceedings - Electrochemical Society
Series volume:
PV 2005-01, 2005
Volume:
207
Issue:
412
Conference title:
Electrochemical Society Meeting (207., 2005, Quebec)
Venue:
Quebec ; Canada
Year of conference:
2005
Date of conference beginning:
16.05.2005
Date of conference ending:
20.05.2005
Publisher:
ECS - The Electrochemical Society
Year:
2005
Pages from - to:
232-241
Language:
Englisch
Keywords:
Current density ; Electric properties ; Nitrogen ; Oxidation, Elastic recoil detection measurements ; Tunneling current density ; Silicon nitride
Abstract:
Starting from thermally grown Si3N4 we have examined the effects of dry and wet reoxidation in 100
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
Miscellaneous:
ECS Meeting Abstracts ; Film Preparation, Characterization, and Applications II - Abstract 412
BibTeX