Login
Document type:
Zeitschriftenartikel / Journal Article
Title:
Quantitative elastic recoil detection (ERD)
Journal:
Fresenius' Journal of Analytical Chemistry
Volume:
353
Issue:
5-8
Year:
1995
Pages from - to:
582-584
Language:
Englisch
Keywords:
Algorithms ; Impurities ; Thin films ; Concentration distribution ; Depth profiles ; Elastic collision ; Quantitative chemical analysis ; Recoil effect ; Rutherford scattering ; Surface analysis ; Spectroscopic analysis
Abstract:
Elastic recoil detection with heavy ions is a well suited method to measure depth profiles of light and medium heavy elements in thin films. Due to known Rutherford scattering cross sections and stopping powers of ions in matter, measurements can be quantified with an accuracy of about 1
ISSN:
0937-0633
DOI:
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
BibTeX