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Document type:
Zeitschriftenartikel / Journal Article
Title:
Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with
Journal:
Surface and Coatings Technology
Issue:
133-134
Year:
2000
Pages from - to:
152-159
Language:
Englisch
Keywords:
Amorphous materials ; Current density ; Grain boundaries ; Microhardness ; Monolayers ; Nanostructured materials ; Plasma enhanced chemical vapor deposition ; Precipitation (chemical) ; Scanning electron microscopy ; Silicon nitride ; Titanium nitride, Nanocomposite coatings ; Titanium disilicide ; Ceramic coatings ; coating ; composite ; hardness ; titanium nitride
Abstract:
Multiphase nanocomposite coatings (3-20 μm thick) consisting of nanocrystalline TiN, amorphous Si3N4, and amorphous and nanocrystalline TiSi2, nc-TiN/a-SiNx/a- and nc-TiSi2 were deposited on steel substrates by means of plasma CVD. The load-independent Vickers microhardness from 80 to > 105 GPa was measured by the load-depth sensing technique for applied loads between 30 and 200 mN and verified by measuring the size of the remaining plastic indentation using SEM. The results of a complex analysi... »
ISSN:
0257-8972
Department:
Fakultät für Luft- und Raumfahrttechnik
Institute:
LRT 2 - Institut für angewandte Physik und Messtechnik
Chair:
Dollinger, Günther
Open Access yes or no?:
Nein / No
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