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Document type:
Konferenzbeitrag / Conference Paper
Title:
A lateral bipolar transistor on SOI fabricated by sub 100 nm e-beam lithography
Title of conference publication:
ESSDERC '95 : proceedings of the 25th European Solid State Device Research Conference
Subtitle of conference publication:
the Netherlands Congress Centre, the Hague, the Netherlands, 25th-27th September 1995
Conference title:
European Solid State Device Research Conference (25., 1995, Den Haag)
Venue:
Den Haag
Year of conference:
1995
Date of conference beginning:
25.09.1995
Date of conference ending:
27.09.1995
Place of publication:
Gif sur Yvette Cedex, France
Publisher:
Editions Frontières
Year:
1995
Language:
Englisch
ISBN:
9782863321829
Department:
Fakultät für Elektrotechnik und Technische Informatik
Institute:
ETTI 1 - Institut für Physik, Elektrotechnik und Automatisierungstechnik
Chair:
Sauter, Martin
Open Access yes or no?:
Nein / No
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