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Authors:
Uedono, Akira; Dickmann, Marcel; Egger, Werner; Hugenschmidt, Christoph; Ishibashi, Shoji; Chichibu, Shigefusa F. 
Document type:
Konferenzbeitrag / Conference Paper 
Title:
Control of vacancy-type defects in Mg implanted GaN studied by positron annihilation spectroscopy 
Collection editors:
Fujioka, Hiroshi; Morkoç, Hadis; Schwarz, Ulrich T. 
Title of conference publication:
Gallium Nitride Materials and Devices XV 
Series title:
Proceedings of SPIE 
Series volume:
11280 
Conference title:
SPIE OPTO (2020, San Francisco, Calif.) 
Venue:
San Francisco, California 
Year of conference:
2020 
Date of conference beginning:
01.02.2020 
Date of conference ending:
06.02.2020 
Place of publication:
Washington, DC 
Publisher:
SPIE 
Year:
2020 
Pages from - to:
28-35 
Language:
Englisch 
Keywords:
GaN ; ion implantation ; defect ; vacancy ; doping ; positron annihilation 
Abstract:
Vacancy-type defects in Mg-implanted GaN were probed using monoenergetic positron beams. Mg+ ions were implanted to provide box profiles with Mg concentrations [Mg] of 1017-1019 cm-3. For as-implanted samples, the major defect species was determined to be Ga-vacancy (VGa) related defects such as divacancy (VGaVN) and/or their complexes with impurities. For Mg-implanted samples, an agglomeration of vacancies started at 800-1000°C annealing, leading to the formation of vacancy clusters such as (VGaVN)3. For the sample with [Mg]=1019 cm-3, the trapping rate of positrons to the vacancies decreased with increasing annealing temperature (≥1100°C), which was attributed to the change in the charge state of vacancy-type defects from neutral to positive (or negative to neutral) due to the activation of Mg. For Mg- and H-implanted samples, the hydrogenation of vacancy-type defects started after 800°C annealing. Comparing with the annealing behavior of defects for the samples without H-implantation, the clustering of vacancy-type defects was suppressed, which can be attributed to the interaction between Mg, H, and vacancies. 
ISBN:
9781510633230 ; 9781510633247 
Department:
Fakultät für Luft- und Raumfahrttechnik 
Institute:
LRT 2 - Institut für Angewandte Physik und Messtechnik 
Chair:
Dollinger, Günther 
Open Access yes or no?:
Nein / No