Hempel, A.; Hempel, M.; Härting, M.; Britton, David T.; Bauer-Kugelmann, Werner; Triftshäuser, Werner
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Defect studies of diamond hard coatings
Zeitschrift:
Radiation Effects and Defects in Solids
Jahrgang:
156
Heftnummer:
1
Jahr:
2001
Seiten von - bis:
215-220
Sprache:
Englisch
Abstract:
We present the results of a combined study of the defect structure and residual stress in a diamond layer, grown by PECVD on a polycrystalline copper substrate with a titanium interlayer. For the defect studies, electron spectroscopies based on electron-positron annihilation were applied. X-ray diffraction techniques were used for both the stress determination in the diamond layer and for a phase analysis of the complete composite structure. The layer was found to contain a significant fraction of vacancy clusters and single vacancy type defects, which are probably situated within the individual grains. The presence of the larger defects may be related to a compressive stress in the layer. «
We present the results of a combined study of the defect structure and residual stress in a diamond layer, grown by PECVD on a polycrystalline copper substrate with a titanium interlayer. For the defect studies, electron spectroscopies based on electron-positron annihilation were applied. X-ray diffraction techniques were used for both the stress determination in the diamond layer and for a phase analysis of the complete composite structure. The layer was found to contain a significant fraction... »