Depth microscopy with swift heavy ions has recently been developed. It is an elastic recoil detection technique with high depth resolution performed at the Munich tandem accelerator and its Q3D magnetic spectrograph. The method provides the possibility of analyzing elemental and isotopic concentration profiles in thin films and foils with high accuracy up to single layer depth resolution near the surface. This technique was applied to examine surface and bulk concentrations of hydrogen in thin carbon foils and carbon films deposited with different deposition techniques. In addition, mixing zones were investigated between silicon substrates and carbon films deposited by ablation of carbon with a Nd:YAG laser at different light intensities. The width of the mixing zone strongly depends on the light intensity for the laser ablation and varies from 0.6 μg/cm2 for a power density of 2 GW/cm2 to 2.5 μg/cm2 for 20 GW/cm2.    «

Depth microscopy with swift heavy ions has recently been developed. It is an elastic recoil detection technique with high depth resolution performed at the Munich tandem accelerator and its Q3D magnetic spectrograph. The method provides the possibility of analyzing elemental and isotopic concentration profiles in thin films and foils with high accuracy up to single layer depth resolution near the surface. This technique was applied to examine surface and bulk concentrations of hydrogen in thin c...    »