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Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Composition analysis using elastic recoil detection
Zeitschrift:
Physica Status Solidi (B) Basic Research
Jahrgang:
216
Heftnummer:
1
Jahr:
1999
Seiten von - bis:
679-682
Sprache:
Englisch
Abstract:
We report quantitative ERD (Elastic Recoil Detection) measurements for the determination of the composition and distribution of the elements in nitride heterostructures. The investigated samples were MOCVD (molecular chemical vapor deposition) and PIMBE (plasma induced molecular beam epitaxy) grown HEMT (high electron mobility transistor) structures from Cornell University. We present the measured Al distribution parallel to the growth direction of Al xGa 1 xN layers of a thickness of about 10 t... »
ISSN:
0370-1972
Fakultät:
Fakultät für Luft- und Raumfahrttechnik
Institut:
LRT 2 - Institut für angewandte Physik und Messtechnik
Professur:
Dollinger, Günther
Open Access ja oder nein?:
Nein / No
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