Monoenergetic positrons are widely used to study defects in near-surface regions and buried interfaces of solids. Depth information is usually obtained by varying the positron implantation energy. However, at energies larger than 10 keV the stopping profile becomes much broader than the positron diffusion length. The study shows that optimum depth resolution can be obtained by stepwise removal of the surface and measurement with the smallest possible positron implantation depth. The removal from... »