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Autoren:
Uedono, Akira; Dickmann, Marcel; Egger, Werner; Hugenschmidt, Christoph; Ishibashi, Shoji; Chichibu, Shigefusa F. 
Dokumenttyp:
Konferenzbeitrag / Conference Paper 
Titel:
Control of vacancy-type defects in Mg implanted GaN studied by positron annihilation spectroscopy 
Herausgeber Sammlung:
Fujioka, Hiroshi; Morkoç, Hadis; Schwarz, Ulrich T. 
Titel Konferenzpublikation:
Gallium Nitride Materials and Devices XV 
Reihentitel:
Proceedings of SPIE 
Bandnummer Reihe:
11280 
Konferenztitel:
SPIE OPTO (2020, San Francisco, Calif.) 
Tagungsort:
San Francisco, California 
Jahr der Konferenz:
2020 
Datum Beginn der Konferenz:
01.02.2020 
Datum Ende der Konferenz:
06.02.2020 
Verlagsort:
Washington, DC 
Verlag:
SPIE 
Jahr:
2020 
Seiten von - bis:
28-35 
Sprache:
Englisch 
Stichwörter:
GaN ; ion implantation ; defect ; vacancy ; doping ; positron annihilation 
Abstract:
Vacancy-type defects in Mg-implanted GaN were probed using monoenergetic positron beams. Mg+ ions were implanted to provide box profiles with Mg concentrations [Mg] of 1017-1019 cm-3. For as-implanted samples, the major defect species was determined to be Ga-vacancy (VGa) related defects such as divacancy (VGaVN) and/or their complexes with impurities. For Mg-implanted samples, an agglomeration of vacancies started at 800-1000°C annealing, leading to the formation of vacancy clusters such as (VGaVN)3. For the sample with [Mg]=1019 cm-3, the trapping rate of positrons to the vacancies decreased with increasing annealing temperature (≥1100°C), which was attributed to the change in the charge state of vacancy-type defects from neutral to positive (or negative to neutral) due to the activation of Mg. For Mg- and H-implanted samples, the hydrogenation of vacancy-type defects started after 800°C annealing. Comparing with the annealing behavior of defects for the samples without H-implantation, the clustering of vacancy-type defects was suppressed, which can be attributed to the interaction between Mg, H, and vacancies. 
ISBN:
9781510633230 ; 9781510633247 
Fakultät:
Fakultät für Luft- und Raumfahrttechnik 
Institut:
LRT 2 - Institut für Angewandte Physik und Messtechnik 
Professur:
Dollinger, Günther 
Open Access ja oder nein?:
Nein / No