Dollinger, Günther; Bergmaier, Andreas; Frey, C. M.; Roesler, M.; Verhoeven, H.
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Impurities of light elements in CVD diamond
Zeitschrift:
Diamond and Related Materials
Jahrgang:
4
Heftnummer:
5-6
Jahr:
1995
Seiten von - bis:
591-595
Sprache:
Englisch
Stichwörter:
Elastic recoil detection ; High resolution depth profiles ; Light elements in diamond ; Photoluminescence
Abstract:
CVD diamond samples were investigated for their content of light elements and their influence on the physical properties by high resolution elastic recoil detection (ERD) analysis. ERD allows quantitative measurements of depth profiles for all light elements with a depth resolution better than 1 nm (near the surface) using 58Ni or 127I ions with a specific energy of about 1 MeV per nucleus and a high resolution magnetic spectrograph. The measurements were focused on the content of hydrogen in (100)-oriented CVD diamond 90 μm thick grown on (100) silicon. The hydrogen content varied from 0.07 at. «
CVD diamond samples were investigated for their content of light elements and their influence on the physical properties by high resolution elastic recoil detection (ERD) analysis. ERD allows quantitative measurements of depth profiles for all light elements with a depth resolution better than 1 nm (near the surface) using 58Ni or 127I ions with a specific energy of about 1 MeV per nucleus and a high resolution magnetic spectrograph. The measurements were focused on the content of hydrogen in (1... »