Britton, David T.; Hempel, A.; Hempel, M.; Härting, M.; Bauer-Kugelmann, Werner; Triftshäuser, Werner
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Defect characterisation of PECVD-grown diamond
Zeitschrift:
Materials Science Forum
Heftnummer:
363-365
Jahr:
2001
Seiten von - bis:
511-513
Sprache:
Englisch
Abstract:
We present the results of a combined study of the defect structure and residual stress in a diamond layer, grown by PECVD on a polycrystalline copper substrate with a titanium interlayer. For the defect studies, both continuous and pulsed positron beam techniques were applied. X-ray diffraction techniques were used for both the stress determination in the diamond layer and for a phase analysis of the complete composite structure. The layer was found to contain a significant fraction of vacancy clusters and single vacancy type defects, situated within the individual grains. The presence of the larger defects can be correlated to a compressive stress in the layer. «
We present the results of a combined study of the defect structure and residual stress in a diamond layer, grown by PECVD on a polycrystalline copper substrate with a titanium interlayer. For the defect studies, both continuous and pulsed positron beam techniques were applied. X-ray diffraction techniques were used for both the stress determination in the diamond layer and for a phase analysis of the complete composite structure. The layer was found to contain a significant fraction of vacancy c... »