Gebauer, J.; Krause-Rehberg, Reinhard; Eichler, Stefan; Bauer-Kugelmann, Werner; Kögel, Gottfried; Triftshäuser, Werner; Luysberg, M.; Sohn, Hoon; Weber, Eicke R.
Dokumenttyp:
Zeitschriftenartikel / Journal Article
Titel:
Vacancy defects in low-temperature-grown GaAs observed by continuous and pulsed slow positrons
Zeitschrift:
Materials Science Forum
Heftnummer:
255-257
Jahr:
1997
Seiten von - bis:
204-208
Sprache:
Englisch
Abstract:
A systematic investigation of GaAs grown at low temperatures (LT-GaAs) was carried out. The vacancy defects in the as-grown material were identified to be mainly Ga vacancies by comparing the core-(W) and valence-(S) annihilation parameters to that of Ga vacancies in highly Si-doped GaAs. The vacancy concentration increases up to 1018 cm-3. Isochronal annealing was done at various samples. The S parameter in the samples increases with annealing, suggesting the formation of new defects. By checking the correlation between S and W we estimated that the defects seen in annealed LT-GaAs are physically different from that in the as-grown state. The annealed samples showed nearly saturated trapping with a defect related positron lifetime of 345 ps, which can be attributed to vacancy clusters or the As precipitates found by correlated TEM measurements. «
A systematic investigation of GaAs grown at low temperatures (LT-GaAs) was carried out. The vacancy defects in the as-grown material were identified to be mainly Ga vacancies by comparing the core-(W) and valence-(S) annihilation parameters to that of Ga vacancies in highly Si-doped GaAs. The vacancy concentration increases up to 1018 cm-3. Isochronal annealing was done at various samples. The S parameter in the samples increases with annealing, suggesting the formation of new defects. By checki... »