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Document type:
Konferenzbeitrag / Conference Paper
Title:
A simulation-based analysis of the cycle time of cluster tools in semiconductor manufacturing
Parallel title:
15th European Simulation Symposium
Collection editors:
Verbraeck, Alexander
Title of conference publication:
Simulation in industry
Subtitle of conference publication:
October 26 - 29, 2003, Delft, The Netherlands
Conference title:
European Simulation Symposium (15., 2003, Delft)
Conference title:
ESS'2003
Venue:
Delft, The Netherlands
Year of conference:
2003
Date of conference beginning:
26.10.2003
Date of conference ending:
29.10.2003
Place of publication:
Erlangen [u.a.]
Publisher:
SCS-Europe
Year:
2003
Pages from - to:
349-354
Language:
Englisch
ISBN:
3-936150-28-1 ; 3-936150-29-X
Open Access yes or no?:
Nein / No
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